KojinUku manufa magnetron sputtering

samfurin:VTC-600-3HD

Bayani na samfurin:

VTC-600-3HD uku manufa magnetron sputter nezuiSabon R & D ci gaba da rufi kayan aiki, za a iya amfani da su don shirya daya ko multi-layer ferroelectric fim, mai gudanarwa fim, gami fim, semiconductor fim, yumbu fim, kafofin watsa labarai fim, gani fim, oxide fim, wuya fim, PTFE fim, da dai sauransu. Idan aka kwatanta da irin wannan na'urorin, ba kawai ana amfani da su sosai ba, amma yana da fa'idodin ƙananan girman aiki, shi ne kyakkyawan kayan aiki don shirya fim na kayan aiki na dakin gwaje-gwaje, musamman don binciken dakin gwaje-gwaje na solid state electrolytes da OLED da sauransu.

Babban fasali:

• Za a iya shirya da yawa fim, wide aikace-aikace
• Small girma, sauki aiki
• Injury dakin, injin famfo assembly inji modular zane, sarrafa ikon samar da shi ne raba zane, za a iya daidaita saya bukatun bisa ga ainihin bukatun mai amfani.
• Za a iya zaɓar wutar lantarki bisa ga ainihin bukatun mai amfani, za a iya sarrafa wutar lantarki ɗaya da yawa, kuma za a iya sarrafa wutar lantarki ɗaya da yawa

Magnetron sputtering kai：

• 3 magnetron sputtering shugabannin shigar da kayan aiki, kuma duk tare da ruwa sanyaya lamination
• Daya daga cikin sputtering kai haɗi da RF ikon samar da, yafi sputtering rufi manufa
• Wani sputtering kai da aka haɗa da DC ikon samarwa, babban sputtering mai gudanarwa manufa
• Manufa size bukatun: diamita ne 50mm, kauri 0.1-5mm (saboda manufa kayan daban-daban kauri daban-daban)
• Za a iya yin oda daban RF cable a matsayin madadin
• Kayan aikin ya ƙunshi ruwa sanyaya inji don manufa head sanyaya

samfurin：

• Mai ɗaukar samfurin girma: φ140mm(zuiBabban da za a iya sanya 4 'tushe)
• Samfurin mai ɗaukar samfurin zai iya juyawa tare da gudun: 1 - 20 rpm (daidaitawa)
• samfurinzuiHigh dumama zafin jiki ne 500 ℃

injin kamari：

• Injin rumbun: φ300 mm × 300 mm H, an yi da bakin karfe
• Kulawa taga: Φ100 mm
• Hanyar buɗewa ta hanyar buɗewa ta sama, yana sa sauya manufa ya fi sauƙi

Gas kwararar mai sarrafawa：

• 2 Mass kwarara mita da aka shigar a ciki na kayan aiki, m: 0-100sccm
• Gas kwarara saiti za a iya aiki a kan wani 6in taba allon
• Wannan tsarin yana buƙatar Ar gas don aiki, kuma an shigar da bawul na rage matsin lamba a kan silinda na gas (ba a haɗa shi da na'urar ba)

injin tsarin：

• An sanya shi tare da tsarin famfo na GZK-103D (Made in Jamus)
• Standard 5E-5mbar iyaka 7.4E-6mbar

Film gauge kauri：

• A daidaitaccen quartz vibration fim kauri gauge shigar a kan kayan aiki, sa ido kan ainihin lokaci kauri na fim tare da ƙuduri na 0.10 Å
• LED nuni nuna, a lokaci guda kuma shigar da dangane da bayanai game da fim da aka yi

samfurin size：

• L1300mm×W660mm H1200mm
• Nauyi: 160 kg

KojinUku manufa magnetron sputtering

samfurin:VTC-600-3HD

Ingancin takardar shaida:CE takardar shaida

Amfani da tips：

• Wannan na'urar ne DIY na'urar, sigogi canji sosai kafin sayen don Allah tabbatar da cewa wayar sadarwa a hankali
• Don samun mafi kyawun ingancin fim, dole ne a shigar da gas mai tsabta (shawarar> 5N)
• Tabbatar da tsabtace na sputtering kai, manufa, substrate da samfurin tebur kafin sputtering rufi
• Don cimma kyakkyawan haɗuwa da fim tare da substrate, don Allah tsabtace substrate surface kafin sputtering
• Ultrasonic tsaftacewa (cikakken sigogi danna hoton da ke ƙasa): (1) acetone ultrasound (2) isopropanol ultrasound - cire mai (3) bushe nitrogen bushewa (4) injin tanda cire ruwa.
• Plasma tsaftacewa: iya surface roughening, iya kunnawa surface chemical binder, iya cire ƙarin gurɓataccen abu.
• Yin wani m buffer layer (kusan 5nm): kamar Gr, Ti, Mo, Ta, za a iya amfani da shi don inganta karafa da kuma haɗin gwiwa.

Gargadi：

• Lura: samfurin da aka shigar a ciki tare da high karfin wuta abubuwa, haramta mai zaman kansa disassembly, da wutar lantarki motsi jiki
• Gas silinda ya kamata a shigar da matsin lamba rage bawul (kayan aiki misali ba hada), tabbatar da gas fitarwa matsin lamba iyakance a 0.02 MPaKasa don amfani da aminci
• Sputtering kai haɗi zuwa high ƙarfin lantarki. Don aminci, mai aiki dole ne sampling da maye gurbin manufa kafin kashe na'urar