
8 inch Olympus Wafer Binciken Tsarin Features
● Wide kewayon daidaitawa, sassauci tare da, 8 inci Olympus wafer dubawa tsarin yana da high amfani da kuma high aminci.
● 8 inch Olympus wafer dubawa tsarin canja wurin daban-daban girman silicon wafer
Dangane da girman siliko, tsarin binciken wafer na jerin AL120 yana da nau'ikan kayan aiki guda 3, guda 200mm (AL120-L8), 150mm da 200mm jituwa (AL120-L86), guda 150mm ko ƙasa da girman (AL120-L6). Kowane abu an tsara shi ne don watsa silicon waƙar da aka riga an bincika ta hanyar microscope. Gaba macro da baya macro dubawa duka za a iya amfani da daban-daban girman silicon wafa.

● 8 inci Olympus wafer dubawa tsarin zai iya watsa ultra-ƙanƙara silicon wafa, wato ƙanƙara zuwa 90um
Don magance ƙarin ƙalubale ultra-thin silicon wafer, Olympus wafer bincike tsarin musamman tsara canja wuri hannu, iya magance 200mm wafer akwatin 25 wafer da kuma m zuwa 90um wafer, da kuma kammala aminci canja wuri da kuma microscope dubawa. Za a iya riga aka saita har zuwa 10 daban-daban kauri na silicon bayanai ta hanyar panel.
● Precision ikon inganta aikin macro dubawa
Sabon injin da ke da aikin binciken macro (LMB) yana juyawa ta atomatik ta digiri 360 don kammala binciken macro na kowane gefe na silikon. Wannan zane zai iya sauƙi gano lahani da kuma granules a kan kyakkyawan baya na silicon. Bugu da ƙari, za a iya karkata silicon waƙa digiri 30 don binciken macro ta amfani da shaker.

● LCD nuni samar da daidaito da kuma aiki sauƙi
LCD nuni samar da ma'aikata mafi intuitive gani ji, sa Olympus wafer duba tsarin duba abubuwa da kuma tsari a bayyane, da kuma sigogi da ake bukata don shigarwa da debugging saiti a kan wani kallo. Sakamakon bincike, ciki har da ma'aikata shigar da macro da microscopic alamun rashin daidaito tare za a iya nuna a kan LCD nuni, sauki mai aiki dubawa.

● Daidaitaccen aminci
Don tsaro na silicon wafer, tsarin binciken wafer na jerin AL120 yana amfani da sabbin hanyoyin gano wafer guda biyu: kauri na wafer na silicon da matsayi a cikin akwatin wafer. Duba matsayin silicon yanki a cikin akwatin kafin canja wuri. An sayi aikin kulle-kulle na atomatik na ɗakin kaya yana haɓaka tsaro na canja wurin silicon waƙa zuwa injin ɗakin kaya.
● Mai ƙarfi da abin dogaro microscope
Olympus Semiconductor Binciken Microscope MX61 yana iya nuna hotuna masu ƙwarewa da ƙwarewa ta hanyoyin kallo daban-daban: filin haske, filin duhu, rarrabuwa, infrared da zurfin ultraviolet. Kayan aiki da lantarki abubuwan tarayya juyawa kwandon, tare da bukatun lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki lantarki
● Biyan SEMI S2 / S8 da kuma RoHS ka'idoji
Tsarin binciken tsarin wafer na jerin AL120 ba kawai ya ba da darajar amincin ƙwayoyin silicon a cikin watsawa ba, har ma yana tabbatar da amincin mai aiki, cikakken dacewa da ƙa'idodin S2 da S8 na SEMI, har ma ya cika ƙa'idodin Rohs.
8 inch Olympus wafer duba tsarin fasaha bayanai
samfurin |
AL120-LMB12-LP |
AL120-LMB12-F |
Wafer girma |
300 mm (SEMI M1.15 t = 775 μm) Zaɓi: 200 mm |
|
Yawan katisi |
Single akwati (Loading, cire da dacewa) |
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Cartridge saita tsawo |
900 mm |
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Loading tashar jiragen ruwa |
akwai |
Babu |
Handling tsari |
Surface macro, ciki macro, duba microscope |
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Bayani Mode |
All dubawa, samfurin dubawa |
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Wafer daidaitawa |
Non-contact tsakiyar zobe |
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Wafer handling hanyar |
Injin sanyi na inji |
|
Aikace-aikacen microscope |
Semiconductor dubawa microscope MX61L |
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Aikace-aikace muhalli |
AC100~120 V,220~240 V,3.0/1.7 A,50/60 Hz , Injin -67 ~ -80 Kpa |
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Jirgin kaya |
XY hannu suction daukar tebur tare da XY roughness / daidaitawa da 360 digiri juyawa inji |
|
Nauyi (ba tare da microscope) |
kimanin 360 kg |
kimanin 270 kg |
